plasma etching system. technical specification for plasma etching system 1. input power 2. power supply 3. gas control 4. control system: 5. plasmas gas compatibility 6. plasma chamber 7. vacuum gauge 8. vacuum pump 9. warranty 10. service facility within india is a must, while service engineering stationed at kolkata will be preferred. 11. plasma etching must has a production history of more than 10 years and at least 2 systems has been installed in last five years in india.